Lingrong Jiang 1,2,3Jianping Liu 1,2,3,*Lei Hu 1,2,3Liqun Zhang 1,3[ ... ]Hui Yang 1,2,3
Author Affiliations
Abstract
1 Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215123, China
2 School of Nano-tech and Nano-bionics, University of Science and Technology of China, Hefei 230026, China
3 Key Laboratory of Nanodevices and Applications, Chinese Academy of Sciences, Suzhou 215123, China
4 Nano Science and Technology Institute, University of Science and Technology of China, Hefei 230026, China
Absorption induced by activated magnesium (Mg) in a p-type layer contributes considerable optical internal loss in GaN-based laser diodes (LDs). An LD structure with a distributed polarization doping (DPD) p-cladding layer (CL) without intentional Mg doping was designed and fabricated. The influence of the anti-waveguide structure on optical confinement was studied by optical simulation. The threshold current density, slope efficiency of LDs with DPD p-CL, and Mg-doped CL, respectively, were compared. It was found that LDs with DPD p-CL showed lower threshold current density but reduced slope efficiency, which were caused by decreasing internal loss and hole injection, respectively.
polarization doping internal loss GaN laser diode 
Chinese Optics Letters
2021, 19(12): 121404
Author Affiliations
Abstract
1 School of Materials Science and Engineering, Shanghai University, Shanghai 201900, China
2 Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
Au80Sn20 alloy is a widely used solder for laser diode packaging. In this paper, the thermal resistance of GaN-based blue laser diodes packaged in TO56 cans were measured by the forward voltage method. The microstructures of Au80Sn20 solder were then investigated to understand the reason for the difference in thermal resistance. It was found that the microstructure with a higher content of Au-rich phase in the center of the solder and a lower content of (Au,Ni)Sn phase at the interface of the solder/heat sink resulted in lower thermal resistance. This is attributed to the lower thermal resistance of Au-rich phase and higher thermal resistance of (Au,Ni)Sn phase.
Journal of Semiconductors
2020, 41(10): 102104
李方直 1,2,*胡磊 1,2田爱琴 2江灵荣 1,2[ ... ]杨辉 1,2
作者单位
摘要
1 中国科学技术大学纳米技术与纳米仿生学院,合肥 230026
2 中国科学院苏州纳米技术与纳米仿生研究所,纳米器件与应用重点实验室,苏州 215123
氮化镓(GaN)基蓝光和绿光激光器在投影显示、激光加工、激光照明、存储等领域具有重要的应用前景与广泛的市场需求。本文着重介绍了GaN基蓝光和绿光边发射激光器的技术难点和相应的解决方案。在GaN基蓝光与绿光激光器中,就制备高质量InGaN/GaN多量子阱、减少内部光学损耗、增加空穴注入效率等方面分别介绍了一些结构与工艺方面的优化方法。简要介绍了垂直腔面发射激光器(VCSEL)、分布式反馈激光器(DFB)的研究现状。
半导体激光器 氮化镓 热退化 In偏析 内部光学损耗 载流子注入效率 semiconductor laser diode GaN thermal degradation In segregation internal optical loss carrier injection 
人工晶体学报
2020, 49(11): 1996
胡磊 1,2张立群 2刘建平 1,2,*黄思溢 2[ ... ]杨辉 1,2
作者单位
摘要
1 中国科学技术大学纳米技术与纳米仿生学院, 安徽 合肥 230026
2 中国科学院苏州纳米技术与纳米仿生研究所纳米器件与应用重点实验室, 江苏 苏州 215123
高功率氮化镓基蓝光激光器在激光显示、激光照明和材料加工等领域具有很大的应用前景。通过优化蓝光激光器p-AlGaN限制层的生长温度,抑制了量子阱热退化,通过优化量子阱结构,改善了载流子分布,研制出了高功率蓝光激光器。利用变腔面反射率法获得蓝光激光器的内部光学损耗为6.8 cm -1,载流子注入效率为90%。在脉冲工作条件下,蓝光激光器的阈值电流密度为1 kA/cm 2,斜率效率为1.65 W/A,预计在6 kA/cm 2电流密度下,输出光功率能达到4 W;在连续工作条件下,激光器的阈值电流密度为1 kA/cm 2,由于封装散热性能不佳,斜率效率下降为1 W/A,预计在6 kA/cm 2的电流密度下,输出光功率为2.2 W。
激光器 氮化镓 蓝光激光器 热退化 内部光学损耗 载流子注入效率 
中国激光
2020, 47(7): 0701025
Lei Hu 1,2Xiaoyu Ren 1Jianping Liu 1,2,*Aiqin Tian 1[ ... ]Hui Yang 1,2
Author Affiliations
Abstract
1 Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou 215123, China
2 School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China
Green laser diodes (LDs) still perform worst among the visible and near-infrared spectrum range, which is called the “green gap.” Poor performance of green LDs is mainly related to the p-type AlGaN cladding layer, which on one hand imposes large thermal budget on InGaN quantum wells (QWs) during epitaxial growth, and on the other hand has poor electrical property especially when low growth temperature has to be used. We demonstrate in this work that a hybrid LD structure with an indium tin oxide (ITO) p-cladding layer can achieve threshold current density as low as 1.6 kA/cm2, which is only one third of that of the conventional LD structure. The improvement is attributed to two benefits that are enabled by the ITO cladding layer. One is the reduced thermal budget imposed on QWs by reducing p-AlGaN layer thickness, and the other is the increasing hole concentration since a low Al content p-AlGaN cladding layer can be used in hybrid LD structures. Moreover, the slope efficiency is increased by 25% and the operation voltage is reduced by 0.6 V for hybrid green LDs. As a result, a 400 mW high-power green LD has been obtained. These results indicate that a hybrid LD structure can pave the way toward high-performance green LDs.
Photonics Research
2020, 8(3): 03000279
Yipeng Liang 1,2,3Jianping Liu 1,2,3Masao Ikeda 2,3Aiqin Tian 2,3[ ... ]Hui Yang 1,2,3
Author Affiliations
Abstract
1 School of Nano Technology and Nano Bionics, University of Science and Technology of China, Hefei 230026, China
2 Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Science, Suzhou 215123, China
3 Key Laboratory of Nanodevices and Applications, Chinese of Academy of Science, Suzhou 215123, China
4 Vacuum Interconnected Nanotech Workstation (NANO-X), Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
The inhomogeneous broadening parameter and the internal loss of green LDs are determined by experiments and theoretical fitting. It is found that the inhomogeneous broadening plays an important role on the threshold current density of green LDs. The green LD with large inhomogeneous broadening even cannot lase. Therefore, reducing inhomogeneous broadening is a key issue to improve the performance of green LDs.
Journal of Semiconductors
2019, 40(5): 052802
Author Affiliations
Abstract
1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215123, China
GaN-based continuous-wave operated blue-violet laser diodes (LDs) with long lifetime are demonstrated, which are grown on a c-plane GaN substrate by metal organic chemical vapor deposition with a 10 × 600 μm2 ridge waveguide structure. The electrical and optical characteristics of a blue-violet LD are investigated under direct-current injection at room temperature (25 °C). The stimulated emission wavelength and peak optical power of the LD are around 413 nm and over 600 mW, respectively. In addition, the threshold current density and voltage are as small as 1.46 kA/cm2 and 4.1 V, respectively. Moreover, the lifetime is longer than 1000 hours under room-temperature continuous-wave operation.
Journal of Semiconductors
2019, 40(2): 022801

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